CMA3000-A0X VTI Hamlin, CMA3000-A0X Datasheet - Page 4

• Manufacturer Part Number: CMA3000-A0X
• Description: Cma3000-a0x Series 3-axis Accelerometer
• Manufacturer: VTI Hamlin

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VTI Technologies Oy
www.vti.fi
General Description
Introduction
Functional Description
Sensing element
Interface IC
Factory calibration
CMA3000-A0X is a three axis accelerometer family targeted for high volume products requiring
small size, low price and low power consumption. It consists of a 3D-MEMS sensing element and a
signal conditioning ASIC in a wafer level package.
Both block diagram of CMA3000-A0X is shown in Figure 1 below.
Figure 1. CMA3000-A0X block diagram with analog interface
This document, no. 82821000, describes the product specification (e.g. operation modes, electrical
properties and application information) for the CMA3000-A0X family. The specification for an
individual sensor is available in the corresponding data sheet.
The sensing element is manufactured using the proprietary bulk 3D-MEMS process, which enables
robust, stable and low noise & power capacitive sensors.
The sensing element consists of three acceleration sensitive masses. Acceleration will cause a
capacitance change that will be then converted into a voltage change in the signal conditioning
ASIC.
CMA3000 includes an internal oscillator, reference and non-volatile memory that enable the
sensor's autonomous operation within a system.
The sensing element is interfaced via a capacitance-to-voltage (CV) converter. Following
calibration in the analog domain, the signal is filtered and buffered.
In active mode analog voltages representing the measured acceleration are available X-, Y-, Z-out
pins. Power Down and measurement range can be selected using external Range ('0'=8g, '1'=2g)
and PD ( '0' =Active, '1'= Power Down ) pins.
Sensors are factory calibrated. Trimmed parameters are gain, offset, internal current reference and
the frequency of the internal oscillator. Calibration parameters will be read automatically from the
internal non-volatile memory during sensor startup.
Oscillator
clock
&
Reference
C/V
PRELIMINARY - Subject to changes
Memory
Volatile
Non-
calibration
low-pass
filtering
Analog
Doc.Nr. 8282100.05
&
Control
PD
Range
X-out
Y-out
Z-out
CMA3000-A0X Series
Rev.05
4/ 17