ZS-XRS2 Omron, ZS-XRS2 Datasheet - Page 10

• Manufacturer Part Number: ZS-XRS2
• Description: Sensor Hardware & Accessories RS232 Cable, 2m
• Manufacturer: Omron

Specifications of ZS-XRS2

• Lead Free Status / Rohs Status: Lead free / RoHS Compliant

10
High-performance Sensors
H i g h g r a d e
Measuring center distance
ZS-HLDS2T/ZS-LD10GT/LD15GT
The Only Way to Very High-precision Measurements
Superior Features for Semiconductor Wafer, Glass, and Other Measurements Requiring Precision
Beam shape
An unbelievable stationary measurement precision of 0.25 µm, the highest in this product class.
Resolution
S l i m
2 6 .
Linearity
Model
4 m
m
ZS-LD10GT/LD15GT
10±0.5 mm/15±0.75 mm
0.25 µm
±0.1%F.S.
25 × 900 µm
Ideal for Measuring Nozzle Gaps!
Reduced pattern influence for moving
measurement, the best in the moving
resolution industry.
Possible to match nozzle drip point and
measurement point then measure.
Sensor Head with separate light emission
and reception in one unit to create nozzle
space.
Measuring center distance
Beam shape
Resolution
Linearity
Model
Measurement
point
Nozzle Gap Sensor
Emitter
ZS-HLDS2T
20±1 mm
0.25 µm
±0.05%F.S.
20 µm × 1 mm
Nozzle
Receiver
Height Control of Sealant Dispensers
Simultaneous Measuring of Touch Panel Film Thickness and Gap
Sealant application
Sealant supply nozzle
Glass
Film
ZS-LD10GT/LD15GT
Glass substrate
Thickness
Gap
Inspection of Disk Play on HDD Motor Rotating Plate
Simultaneous measurement of transparent object thickness and gap
100
95
90
85
80
75
70
65
60
0
0.2
0.2
Travel distance (mm)
0.4
0.6
0.8
Measures amplitude undulations of 5 µm.
1
-1
-2
-3
-4
-5
2
1
0
1
400
350
300
250
200
150
100
50
0
0
251
0.2
ZS-LD10GT
Travel distance (mm)
501
0.4
0.6
751
0.8
Number
of data
1