MXR9500MZ MEMSIC, MXR9500MZ Datasheet

IC, 3 AXIS ACCELEROMETER, ± 1.5G, LCC-16

MXR9500MZ

Manufacturer Part Number
MXR9500MZ
Description
IC, 3 AXIS ACCELEROMETER, ± 1.5G, LCC-16
Manufacturer
MEMSIC
Datasheet

Specifications of MXR9500MZ

No. Of Axes
3
Sensor Case Style
LCC
No. Of Pins
16
Supply Voltage Range
2.7V To 3.6V
Operating Temperature Range
-40°C To +85°C
Termination Type
SMD
Acceleration Range
± 1.5g
Filter Terminals
SMD
Rohs Compliant
Yes
Lead Free Status / RoHS Status
Lead free / RoHS Compliant
FEATURES
Low cost
RoHS compliant
Resolution better than 1 mg
Tri-axis accelerometer in a single package.
On chip mixed signal processing
No moving parts
No loose particle issues
>50,000 g shock survival rating
SMT package: 7mm X 7mm X 1.8mm
2.7V to 3.6V single supply continuous operation
No adjusting external components needed
APPLICATIONS
GPS
Consumer – LCD projectors, pedometers, blood pressure
I
Cell Phones
Gaming – Joystick/RF Interface/Menu Selection/Tilt
Sensing
Security – Gas Line/Elevator/Fatigue Sensing
GENERAL DESCRIPTION
The MXR9500G/M is a low cost, tri axis accelerometer
fabricated on a standard, submicron CMOS process. It is a
complete sensing system with on-chip mixed signal
processing. The MXR9500G/M measures acceleration with
a full-scale range of ±1.5 g and a sensitivity of 500mV/g
@3.0V at 25
(e.g. vibration) and static acceleration (e.g. gravity). The
MXR9500G/M design is based on heat convection and
requires no solid proof mass. This eliminates stiction and
particle problems associated with competitive devices and
provides shock survival greater than 50,000 g, leading to
significantly lower failure rate and lower loss due to
handling during PCB assembly and at customer field
application.
Information furnished by MEMSIC is believed to be accurate and reliable. However,
no responsibility is assumed by MEMSIC for its use, nor for any infringements of
patents or other rights of third parties which may result from its use. No license is
granted by implication or otherwise under any patent or patent rights of MEMSIC.
MEMSIC MXR9500G/M Rev.D
nformation Appliances – Computer Peripherals/PDA’s/
Electronic Compass Tilt Correction/Navigation
°C
monitor, digital cameras/MP3 players
. It can measure both dynamic acceleration
Low Cost
±1.5 g Tri Axis Accelerometer with
Ratiometric Outputs
Page 1 of 8
Sensor
Sensor
Sensor
X
Y
Z
VDD1
The MXR9500G/M provides three ratiometric analog
outputs that are set to 50% of the power supply voltage at
zero g.
The Max. noise floor is 1 mg/ Hz allowing signals below
1mg to be resolved at 1 Hz bandwidth. The MXR9500G/M
is packaged in a hermetically sealed, surface mount LCC
16pins package (7 mm x 7 mm x 1.8 mm height) and is
operational over a
temperature range.
I
chip.
©MEMSIC, Inc.
800 Turnpike St., Suite 202, North Andover, MA01845, USA
Tel: +1 978 738 0900
www.memsic.com
2
C fast mode interface is soon available in the next generation
Reference
VDD2
Gain Adjust
Gain Adjust
Gain Adjust
VDD3
FUNCTIONAL BLOCK DIAGRAM
Temp
Comp
Temp
Comp
Temp
Comp
-40°C to +85°C (M) and 0°C to +70°C (G)
DI1
MXR9500G/M
Digital Interface
SCK1
Fax: +1 978 738 0196
A/D
A/D
A/D
DI2
D/A
D/A
D/A
SCK2
Clock
LPF
LPF
LPF
2/27/2007
Xout
Yout
Zout
VSA1
VSA2

Related parts for MXR9500MZ

MXR9500MZ Summary of contents

Page 1

... Information furnished by MEMSIC is believed to be accurate and reliable. However, no responsibility is assumed by MEMSIC for its use, nor for any infringements of patents or other rights of third parties which may result from its use. No license is granted by implication or otherwise under any patent or patent rights of MEMSIC. ...

Page 2

... Cross axis sensitivity is the algebraic sum of the alignment and the inherent sensitivity errors. Output settled to within ±17mg. 4 MEMSIC MXR9500G/M Rev.D Measurements @ 25°C, Acceleration = 0 g unless otherwise noted; VDD1, VDD3 = 3.0V unless Conditions Min ±1.5 Each Axis Best fit straight line ...

Page 3

... Xout X Channel Output 14 VDD3 2.7V to 3.6V 15 SCK2 Connect to Ground 16 DI2 Power Down Pin Ordering Guide Temperature Model Range MXR9500GZ 0 to 70°C MXR9500MZ -40 to 85°C All parts are shipped in tape and reel packaging. Caution: ESD (electrostatic discharge) sensitive device. MEMSIC MXR9500G/M Rev.D I ...

Page 4

... X&Y Offset Deviation Sensitivity X&Y Distribution 30% 25% 20% 15% 10 476 481 486 491 496 501 X&Y Axis Sensitivity Distribution MEMSIC MXR9500G/M Rev.D = 3.0V) DD 40% X-axis Y-axis 35% 30% 25% 20% 15% 10% 5% offset(mg -95 -75 30% X-axis Y-axis 25% 20% 15% 10% 5% Sen(mV/g) 0% 506 ...

Page 5

... OffsetZ vs. T emp 1.60 1.58 1.56 1.54 1.52 1.50 1.48 1.46 1.44 1.42 1.40 1.38 1.36 -50 -30 -10 10 Normalized Sensitivity X&Y vs. Temp 1.20 1.15 1.10 1.05 1.00 0.95 0.90 0.85 0.80 -50 -30 -10 10 MEMSIC MXR9500G/M Rev Page 2/27/2007 ...

Page 6

... Normalized Sensitivity Z vs. Temp 1.20 1.15 1.10 1.05 1.00 0.95 0.90 0.85 0.80 -50 -30 -10 MEMSIC MXR9500G/M Rev Page T( 2/27/2007 ...

Page 7

... This pin is the analog output of the Y-axis Yout – acceleration sensor This pin is the analog output of the Z-axis Zout – acceleration sensor. MEMSIC MXR9500G/M Rev.D POWER SUPPLY NOISE REJECTION One capacitor is recommended for best rejection of power . The supply noise. The capacitor should be located as close as accelerometer possible to the device supply pin (VDD1,VDD3) ...

Page 8

... MEMSIC MXR9500G/M Rev.D PACKAGE DRAWING 0.5x45 Page 2/27/2007 ...

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