sm5470 Servoflo Corporation, sm5470 Datasheet - Page 2

• Manufacturer Part Number: sm5470
• Description: Low Cost Packaged Pressure Sensors
• Manufacturer: Servoflo Corporation

ORDERING INFORMATION
40SP5012.00
CHARACTERISTICS FOR SM5430/SM5470 - SPECIFICATIONS
All parameters measure at 5 V excitation at room temperature, unless otherwise specified.
All Models
Parameter
Excitation Voltage
Excitation Current
Zero Offset
TC Span
TC Resistance
Bridge Impedance
Operating Temp
Storage Temp
SM5430 Standard Pressure Series
Span (FS Range), PSI (kPa)
Linearity
TC Offset
Burst Pressure
SM5470 Low Pressure Series Only
Span (FS Range), PSI (kPa)
Linearity
TC Offset
Burst Pressure
Notes:
1. Measured from 0 to 70°C
2. Sensor die will survive pressure specified for all ranges. Maximum package pressure is 150 PSI.
3. Defined as best-fit straight line (BFSL); for 0.3 PSI full-scale, linearity is +0.5%FS. For 0.15 PSI full-scale, linearity is +2.5%FS.
4. Tested on a sample basis.
03_08
SM5470 - 008 - G - B
0.15 (1.03)
0.30 (2.07)
0.80 (5.52)
1.50 (10.3)
3.00 (20.7)
15 (103)
30 (207)
60 (414)
5 (34)
Tel: [phone] ♦ Fax: [phone] ♦ [e-mail] ♦ www.si-micro.com
Silicon Microstructures, Inc. ♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 USA
SM5470
SM5430
Min.
Min.
Min.
-0.2
>5X
-0.3
15X
105
115
115
-75
-50
-15
-40
-40
-12
2.7
33
75
25
25
25
25
25
Pressure Type
A: Absolute (except 5470)
G: Gauge
D: Differential
Available Cap Type
B: Horizontal Barbed Port(s)
-5
0
0
Low Cost Packaged Pressure Sensors
Typ.
Typ.
+0.07
Typ.
+0.1
100
145
165
180
5.0
1.5
-30
-19
3.3
28
50
50
50
50
50
-1
0
PSI
Max.
Max.
Max.
+0.2
+0.3
10.0
+25
+50
+12
125
175
195
220
3.0
-24
4.0
15
30
60
25
85
85
+5
85
85
85
85
85
Std. Pressure
5
Ranges
SM5430/SM5470
5430
005
015
030
060
Rated FS Pressure
Rated FS Pressure
%FS/100°C
%FS/100°C
%FS/100°C
%/100°C
Units
Units
Units
%FS
%FS
mA
mV
mV
mV
mV
mV
mV
mV
mV
mV
mV
mV
kΩ
°C
°C
V
PSI
0.15
0.30
0.80
1.50
3.00
Low Pressure
Ranges
5470
001
003
008
015
030
Notes
Notes
Notes
1, 4
1, 4
3, 4
1, 4
2, 4
3, 4
1, 4
2, 4
4
4