E32-D14L 5M Omron, E32-D14L 5M Datasheet - Page 18

• Manufacturer Part Number: E32-D14L 5M
• Description: Fiber Optic Sensors DIFFUSE SIDE BEAM 5M TYPE
• Manufacturer: Omron

Specifications of E32-D14L 5M

• Lead Free Status / Rohs Status: Lead free / RoHS Compliant

Features/Applications
18
Application-corresponding Models
Wafer Mapping
• Wafers are reliable detected with an ultrafine beam.
• The optical axis is adjusted before delivery to allow
easy installation.
E32-A03-1
■ Overview of Model Variations
*The sensing distances apply for use in combination with the E3X-DA-S Amplifier Unit (general-purpose, standard mode).
Type
Opening angle: 1.5°
Opening angle: 3° ultraslim
E32-A03
Features
With mounting
flange
With mounting
flange
■ Features
■ Engineering Data
Shape, sensing distance (mm)*
Optical axis adjusted
before delivery so
that displacement is
typically within 0.1°.
180
160
140
120
100
80
60
40
20
0
−10
8-inch Wafer Mapping Characteristic (Typical Examples)
−9
2 wafers
For
−8
−7
−6
−5
Distance moved, X (mm)
also be detected
Wafer piles can
Direction of rotation
−4
−3
1 wafer
−2
340
For
890
−1
0
E32-A03
E32-A03-1
E32-A04
E32-A04-1
1
Vertical rotation
6.35 mm
2
Fiber
2-wafer pile
Model number
3
4
170 mm
(t = 0.75 mm)
Silicon wafer
X
Fiber