EM1NR SENSIRION, EM1NR Datasheet - Page 12

• Manufacturer Part Number: EM1NR
• Description: Flow Sensor
• Manufacturer: SENSIRION

Specifications of EM1NR

• Pressure Max: 116psi
• Accuracy: ± 3% At 1-100% Full Scale
• Flow Range: 0-20 Ln/min
• Sensing Accuracy: 3%
• Output Type: RS 232/SPI
• Supply Voltage Max: 18VDC
• Flow Rate Min: 0l/min
• Pressure Drop: 0.29psi
• Supply Voltage Min: 7VDC
• Sensor Output: RS-232/SPI
• Rohs Compliant: Yes
• Flow Rate Max: 20l/min
• Accuracy %: 3%
• Lead Free Status / RoHS Status: Lead free / RoHS Compliant

CMOSens
6
When ordering CMOSens
information access Sensirion’s website on http://www.sensirion.com
Table 11: Overview ordering information
6.1
Table 12: Units for gas flow rates
Example: Relationship for N
7
Table 13: Revision history
Notes:
www.sensirion.com
Date
August 2002
March 2004
March 2005
June-August 2006 V2.5
October 2006
August 2007
November 2008
March 2009
Calibrated for Gas Type
Air
Air
N2
N2
Other gas types on request
Typical flow unit
Ordering Information
Revision history
Supported Flow Units
mln/min
ln/min
sccm
slm
ln/min (0°C, 1013 mbar)
1 ln/min
10 ln/min
®
EM1 Mass Flow Meter for Gases
(norm milliliter per minute)
(norm liter per minute)
(standard cubic centimeter per minute)
(standard liter per minute)
Version
Preliminary
V2.2
V2.3
V2.6
V2.8
V2.9
V3.0
®
2
EM1 series devices please refer to the following part numbers. For the latest product
between:
Page(s)
all
all
all
1-5,9,10,
13-16
1,16
all
12,14
3,13,14
Range
0 – 200 ln/min
0 – 20 ln/min
0 – 0.5 ln/min
0 – 0.05 ln/min
Data Sheet EM1 – v3.0 /March 2009
Changes
First public release
Specifications, typos, various small modifications
Specifications, typos, various small modifications
General update. I.e. EEPROM write access recommendation, new
disclaimer, new model (Typ. EM1NH), change to aluminum flanges,
introduction of revision history
RoHS compliance
Microprocessor EOL. Change of microprocessor. SPI Interface removed
order information
Flowunit corrected, Address Sensirion China
and
=
=
Reference condition
Gas Temperature
Connection
Straight/no connector
straight/no connector
straight/no connector
straight/no connector
20 °C / 68° F
0 °C / 32° F
slm (20°C / 68°F, 1013 mbar / 14.69)
1.073 slm
10.73 slm
Code
EM1NV4R0V_1A
EM1NR4R0V_1A
EM1NL4R0V_1N
EM1NH4R0V_1N
-
Gas Pressure
1013 mbar / 14.69 psi
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