s9038-1002s Hamamatsu Photonics, K.K.,, s9038-1002s Datasheet

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s9038-1002s

Manufacturer Part Number
s9038-1002s
Description
Ccd Image Sensor
Manufacturer
Hamamatsu Photonics, K.K.,
Datasheet
I M A G E S E N S O R
CCD image sensor
S9037/S9038 series
S9037/S9038 series FFT-CCD image sensors were developed for high-speed line scan cameras. Since an on-chip amplifier having a wide
bandwidth is used to an image sensor, a pixel rate of 10 MHz can be obtained. S9037/S9038 series image sensors also deliver a high line scan
rate equivalent to interline CCD sensors when used in line binning operation mode, because they have an active area pixel format where the
number of vertical pixels is less than the number of horizontal pixels. This makes S9037/S9038 series ideal for line scan cameras.
S9037/S9038 series image sensors have a pixel size of 24 × 24 µm and are available in pixel formats of 512 × 4 pixels and 1024 × 4 pixels.
S9038 series has a one-stage thermoelectric cooler assembled in the same package allowing stable operation at cooled temperatures. Both
S9037/S9038 series image sensors use a quartz glass window equivalent to SUPRASIL glass that provides high transmittance even at 193 nm
wavelength. These image sensors also have stable quantum efficiency in the UV region making them ideal for excimer laser monitors.
*1: Window-less type is available as option.
S9037-0902
S9037-1002
S9038-0902S
S9038-1002S
Line rate
Data rate
Vertical clock
Horizontal clock
Output circuit
Package
Window material *
Selection guide
Specifications
l
l
l
l
l
l
High-speed operation, back-thinned FFT-CCD
Features
High-speed operation: 10 MHz
Pixel size: 24
Line/pixel binning operation
S9038 series: one-stage thermoelectric cooling
High quantum efficiency: 90 % or more at peak
MPP operation
Type No.
Parameter
1
24 µm
One-stage TE-cooled
Non-cooled
Cooling
Quartz window equivalent to SUPRASIL
S9037-0902
16 kHz
Number of total pixels
1044
1044
520
520
Two-stage MOSFET source follower
6
6
S9037-1002
Applications
l
l
8
8
Excimer laser monitors
High-speed line scan cameras
8 kHz
24 pin metal package
Number of active pixels
2 phases
2 phases
10 MHz
1024
1024
512
512
S9038-0902S
16 kHz
4
4
4
4
AR-coated sapphire
[mm (H)
12.288
24.576
12.288
24.576
Active area
S9038-1002S
8 kHz
mm (V)]
0.096
0.096
0.096
0.096
1

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s9038-1002s Summary of contents

Page 1

... S9037-0902 S9037-1002 16 kHz 8 kHz 10 MHz 2 phases 2 phases Two-stage MOSFET source follower 24 pin metal package Quartz window equivalent to SUPRASIL Active area [mm (H) mm (V)] 512 4 12.288 0.096 1024 4 24.576 0.096 512 4 12.288 0.096 1024 4 24.576 0.096 S9038-0902S S9038-1002S 16 kHz 8 kHz AR-coated sapphire 1 ...

Page 2

... TGH Low V -9 TGL Symbol Remark fc - frg - -0902 - P1V P2V -1002 - -0902 - P1H P2H -1002 - CTE * Vout - S9037/S9038 series Typ. Max. - +70 - +70 - +25 - +18 - +18 - +15 - +15 - +15 - +15 - +15 - +15 - +15 Typ. Max 12 ...

Page 3

... Spectral transmittance characteristics (Typ. Ta=25 ˚C) 100 BACK-THINNED 1000 1200 100 200 KMPDB0058EA Dark current vs. temperature 10000 1000 100 10 1 0.1 -50 200 KMPDB0150EA S9037/S9038 series Typ. Max 300 - 600 - 1.2 - µV/e 4,000 - - e /pixel/s 200 - 100 - e 6000 - - ±10 200 to 1100 - (Typ. Ta=25 ˚ ...

Page 4

... Device structure CCD image sensor S9037-0902, S9038-0902S THINNING P2H P1H 4 BLANK 512 ACTIVE S9037-1002, S9038-1002S THINNING P2H P1H 4 BLANK 1024 ACTIVE 6 BEVEL S9037/S9038 series P1V P2V TG ISH IG2H IG1H 4 BLANK P1V P2V TG ISH IG2H ...

Page 5

... P1H, P2H Rise and fall time Duty ratio Pulse width SG Rise and fall time Duty ratio Pulse width RG Rise and fall time TG (P2V) - P1H Overlap time S9037/S9038 series CCD image sensor READOUT PERIOD Tpwh, Tpws Tpwr Symbol Min. Tpwv 1 Tprv, Tpfv - Tpwh ...

Page 6

... PIN No. 1 TE-COOLER 6 CCD image sensor 2.54 PHOTOSENSITIVE SURFACE (24 ×) 0.5 KMPDA0153EB PHOTOSENSITIVE SURFACE (24 ×) 0.5 KMPDA0155EA S9037/S9038 series S9037-1002 WINDOW 28.6 ACTIVE AREA 24.58 2.54 44.0 INDEX MARK PIN No. 1 PHOTOSENSITIVE SURFACE (24 ×) 0.5 S9038-1002S WINDOW 28.6 ACTIVE AREA 24.58 2.54 44.0 52.0 60.0 INDEX MARK PHOTOSENSITIVE SURFACE PIN No. 1 TE-COOLER (24 ×) 0.5 KMPDA0154EA KMPDA0156EA ...

Page 7

... S9037/S9038 series CCD image sensor S9037-1002N INDEX MARK PIN No. 1 KMPDA0165EA S9038-1002N WINDOW 28.6 ACTIVE AREA 24.58 INDEX MARK PIN No. 1 KMPDA0167EA ...

Page 8

... Tc * =Th * =25 °C 1 =Th * =25 °C 3.8 3.4 70 (Typ. Ta=25 ˚ -10 -20 -30 -40 1.5 2.0 KMPDB0178EA S9037/S9038 series S9038-1002 1.2 3.0 3.6 5.1 70 S9038-1002S (Typ. Ta=25 ˚ VOLTAGE vs. CURRENT CCD TEMPERATURE vs. CURRENT -10 2 -20 1 - CURRENT (A) KMPDB0179EA (Typ. Ta=25 ˚ 100 ...

Page 9

... Italy: Hamamatsu Photonics Italia S.R.L.: Strada della Moia, 1/E, 20020 Arese, (Milano), Italy, Telephone: (39) 02-935-81-733, Fax: (39) 02-935-81-741 CCD image sensor Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications are subject to change without notice. No patent rights are granted to any of the circuits described herein. ©2007 Hamamatsu Photonics K.K. S9037/S9038 series Cat. No. KMPD1067E04 Oct. 2007 DN 9 ...

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