D3965MMA7660FC Freescale, D3965MMA7660FC Datasheet - Page 9

• Manufacturer Part Number: D3965MMA7660FC
• Manufacturer: Freescale

Specifications of D3965MMA7660FC

• Operating Supply Voltage (min): 2.4V
• Operating Supply Voltage (typ): 2.8V
• Operating Supply Voltage (max): 3.6V
• Operating Temperature (min): -40C
• Operating Temperature (max): 85C
• Operating Temperature Classification: Industrial
• Product Depth (mm): 3mm
• Product Height (mm): 1mm
• Product Length (mm): 3mm
• Mounting: Surface Mount
• Pin Count: 10
• Lead Free Status / RoHS Status: Compliant

PRINCIPLE OF OPERATION
single package. The sensing element is sealed hermetically at the wafer level using a bulk micro machined cap wafer. The
g-cell is a mechanical structure formed from semiconductor materials (polysilicon) using masking and etching processes.
formed; one being between the movable beam and the first stationary beam and the second between the movable beam and the
second stationary beam.
difference between the two capacitors. The ASIC also signal conditions and filters (switched capacitor) the signal, providing a
digital output that is proportional to acceleration.
Sensors
Freescale Semiconductor
The Freescale Accelerometer consists of a MEMS capacitive sensing g-cell and a signal conditioning ASIC contained in a
The sensor can be modeled as a movable beam that moves between two mechanically fixed beams
The ASIC uses switched capacitor techniques to measure the g-cell capacitors and extract the acceleration data from the
Figure 4. Simplified Transducer Physical Model
ACCELERATION
(Figure
4). Two gaps are
MMA7660FC
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